From a quaint marching band-centric event to a blockbuster concert that draws the biggest names in music and millions of viewers, the Super Bowl Halftime Show has come a long way.

Among other things, the University of Arizona Symphonic Marching Band performed “The Sound of Music” and “When the Saints Go Marching In” during the 1967 halftime show. In time, it began to expand, but not to the level of the A-list.

Everything changed in 1993 when Michael Jackson headlined the halftime show. Before long, fans grew accustomed to seeing the biggest pop star in the world perform at the biggest game in America. Besides providing live entertainment to football fans waiting patiently for the third quarter to start, it became a badge of honor for artists invited to perform. Musicians who play the Super Bowl have earned their stripes as legends for a reason, one of the most coveted milestones in their career.

Check out Billboard’s 13 best Super Bowl Halftime Show performances of all time, from Michael Jackson’s game-changing performance to Justin Timberlake and Janet Jackson’s culture-shifting blunders.

13. Coldplay, Beyoncé and Bruno Mars (2016)

12. Janet Jackson & Justin Timberlake (2004).

11. Katy Perry (2015)

10. Michael Jackson (1993)

9. Paul McCartney (2005)

8. Lady Gaga (2017)

7. The Rolling Stones (2006)

6. Beyoncé (2013)

5. Bruce Springsteen & the E Street Band (2009)

4. Madonna (2012)

3. Dr. Dre & Friends (2022)

2. U2 (2002)

1. Prince (2007)

Source: Billboard.com